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Introduction to MEMS
MEMS Design and Fabrication
MEMS Application
Introduction to MEMS Sensors
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Structural Design, Modeling, and Simulation
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Friction of Different Monolayer Lubricants in MEMs Interfaces
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Fabrication of MEMS Devices:
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A modular approach for simulation-based optimization of MEMS
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MEMS Fabrication
It is obvious that nano- and microtechnologies drastically change the
fabrication and manufacturing of materials, devices, and systems through:
• predictable properties of nano composites and materials (e.g., light
weight and high strength, thermal stability, low volume and size,
extremely high power, torque, force, charge and current densities,
specified thermal conductivity and resistivity, et cetera),
• virtual prototyping (design cycle, cost, and maintenance reduction),
• improved accuracy and precision, reliability and durability,
• higher degree of efficiency and capability, flexibility and integrity,
supportability and affordability, survivability and redundancy,
• improved stability and robustness,
• higher degree of safety,
• environmental competitiveness.
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