Introduction to MEMS
MEMS Design and Fabrication
MEMS Application
Introduction to MEMS Sensors
Introduction MEMS accelerometer.
MEMS Gyro
RF MEMS
Silicon MEMS
Investing in MEMS
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The previous diffculty we had to define MEMS stems from the vast number of products that fall under the MEMS umbrella. The MEMS component currently on the market can be broadly divided in six categories (Table 1), where next to the well-known pressure and inertia sensors produced by di?erent manufac- turer like Motorola, Analog Devices, Sensonor or Delphi we have many other products. The micro-fluidic application are best known for the inkjet printer head popularized by Hewlett Packard, but they also include the burgeoning bioMEMS market with micro analysis system like the capillary electrophoresis system from Agilent or the DNA chips.
Optical MEMS includes the component for the fiber optic telecommunication like the switch based on a moving mirror produced by Sercalo. They also include the optical switch matrix that is now waiting for the recovery of the telecom- munication industry. This component consists of 100s of micro-mirror that can redirect the light from one input fiber to one output fiber, when the fibers are arranged either along a line (proposed by the now defunct Optical Micro Machines) or in a 2D configuration (Lambda router from Lucent). Moreover MOEMS deals with the now rather successful optical projection system that is competing with the LCD projector. The MEMS products are based either on an array of torsional micro-mirror in the Texas Instrument Digital Light Processor (DLP) system or on an array of controllable grating as in the Grating Light Valve (GLV) from Silicon Light Machines.
RF MEMS is also emerging as viable MEMS market. Next to passive components like high-Q inductors produced on the IC surface to replace the hybridized component as proposed by MEMSCAP we find RF switches and soon microme- chanical filters.
But the list does not end here and we can find micromachined relays (MMR) produced for example by Omron, HDD read/write head and actuator or even toys, like the autonomous micro-robot EMRoS produced by EPSON.
In 2002 these products represented a market of about 3.2B$, with roughly one third in inkjet printer nozzle, one third in pressure sensor and the rest split between inertia sensors, RF MEMS, optical MEMS, projection display chip and bioMEMS . Of course the MEMS market overall value is still small compared to the 180B$ IC industry - but there are two aspects that still make it very interesting:
• it is expected to grow at an annual rate of 18% for the foreseeable future, much higher than any projection for IC industry;
• MEMS chips have a large leveraging e?ect, and in the average a MEMS based systems will have 8 times more value than the MEMS chip price (e.g., a DLP projector is about 10 times the price of a MEMS DLP chip).
This last point has created very large di?erence between market studies, whether they reported market for components alone or for systems. The number cited above are in the average of other studies and represent the market for the MEMS components alone.
Sensors and Actuators
Microrobotics
Microscale Vacuum Pumps and Generators
The large-scale integrated MEMS (a single chip that can be mass-produced using the CMOS, lithography, and other technologies at low cost) integrates:
• N nodes of actuators/sensors, smart structures, and antennas;
• processor and memories,
• interconnected networks (communication busses),
• input-output (IO) devices,
• etc.
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