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Introduction to MEMS MEMS Design and Fabrication MEMS Application Introduction to MEMS Sensors Introduction MEMS accelerometer. MEMS Gyro RF MEMS Silicon MEMS Investing in MEMS Some of my other Sites:- Nanotechnology Site on Carbon Nanotube CNT SWNT Investing Stocks companies in Nanotechnology MEMS Nanotechnology Free download Pdf papers. Free Pdf papers- Nanotechnology Fabrication and Nanomanufacturing. Nano biotechnology - research investing nanomedicine Nanoelectronics Free downloads Nanophysics free downloads |
Introduction to MEMS technology - free download pdf papers articles reports research.INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS Pdf Slides Free full download 71 pages full pdf download Advantages offered The development of a MEMS component has a cost that should not be mise- valuated but the technology has the possibility to bring unique benefits. The reasons that prompt the use of MEMS technology can be classified broadly in three classes: • miniaturization of existing devices, like for example the production of silicon based gyroscope which reduced existing devices weighting several kg and with a volume of 1000 cm3 to a chip of a few grams contained in a 0.5 cm3 package. • development of new devices based on principles that do not work at larger scale. A typical example is given by the biochips where electrical field are use to pump the reactant around the chip. This so called electro-osmotic e?ect based on the existence of a drag force in the fluid works only in channels with dimension of a fraction of one mm, that is, at micro-scale. • development of new tools to interact with the micro-world. In 1986 H. Rohrer and G. Binnig at IBM were awarded the Nobel price in physics for their work on scanning tunneling microscope. This work heralded the development of a new class of microscopes (atomic force microscope, scanning near-field optical microscope...) that shares the presence of mi- cromachined sharp micro-tips with radius below 50 nm. This micro-tool was used to position atoms in complex arrangement, writing Chinese char- acter or helping verify some prediction of quantum mechanics. Another example of this class of MEMS devices at a slightly larger scale would be the development of micro-grippers to handle cells for analysis. By far miniaturization is often the most important driver behind MEMS development. The common perception is that miniaturization reduces cost, by decreasing material consumption and allowing batch fabrication, but an important collateral benefit is also in the increase of applicability. Actually, reduced mass and size allow placing the MEMS in places where a traditional system won’t have been able to fit. Finally, these two effects concur to increase the total market of the miniaturized device compared to its costlier and bulkier ancestor. A typical example is brought by the accelerometer developed as a replacement for traditional airbag triggering sensor and that is now used in many appliances, as in digital cameras to help stabilize the image or even in the contact-less game controller integrated in the latest handphones. However often miniaturization alone cannot justify the development of new MEMS. After all if the bulky component is small enough, reliable enough, and particularly cheap then there is probably no reason to miniaturize it. Micro- fabrication process cost cannot usually compete with metal sheet punching or other conventional mass production methods. Scaling of Micromechanical Devices Properties of MEMS Materials Physics of MEMS Devices |
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